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Multiple Film Frame Shippers
Entegris multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping "diced" or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300mm, 200mm and 150mm film frame applications.
Product features include:
- Snap-in-place replaceable cushion prevents frame movement and minimizes particle transfer during shipping
- Positive snap latch assures secure closure
- Non-obtrusive latch and stackable design reduce storage space and shipping costs
- Rounded corners and sloped sides minimize water entrapment during cleaning
- Capacity: 13 (300mm) and 25 (200/150mm)
- Configurations for both metal and plastic
- Available in ESD safe materials
- Contact factory for available RFID and laser marking options
 Entegris offers light-weight plastic film frame rings to complement multiple film frame shippers.
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For 300mm Wafers |
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| Frame Size Accommodated |
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| Part Number |
Frame Size "X"
mm (inch) |
Frame Size "Z"
mm (inch) |
Recommended Entegris Film Frame Ring |
| E400-380-102 |
380mm
(14.8") |
3.5mm
(0.137") |
FFP300-380-xxxx |
| E400-380-101 |
380mm
(14.8") |
1.5mm
(0.057") |
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 Product Literature
(Available to logged in users)
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For 200mm Wafers |
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| Frame Size Accommodated |
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| Part Number |
Frame Size "X"
mm (inch) |
Frame Size "Z"
mm (inch) |
Recommended Entegris Film Frame Ring |
| E400-276-101 |
276.0mm
(10.866") |
3.25mm
(0.128") |
FFP200-276-xxxx |
| E400-266-101 |
266.7mm
(10.500") |
1.85mm
(0.073") |
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For 150mm Wafers |
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| Frame Size Accommodated |
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| Part Number |
Frame Size "X"
mm (inch) |
Frame Size "Z"
mm (inch) |
Recommended Entegris Film Frame Ring |
| E400-085-101 |
215.9 mm
(8.500") |
2.40 mm
(0.094") |
FFP150-216-xxxx |
| E400-083-101 |
212.0 mm
(8.346") |
2.40 mm
(0.094") |
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Additional features:
- Integral ID card holder accommodates standard size ID cards
- Numbered slots allow easy frame alignment and counting of contents
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Replacement Cushions |
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Replacement Latches |
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